TY  - GEN
AU  - Lieberman, Michael A.
AU  - Lichtenberg, Allan J.
TI  - PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING
SN  - 9780471720010
U1  - 530.44 
PY  - 2005///
CY  - Canada
PB  - Wiley
KW  - Plasma dynamics
KW  - Plasma chemistry
KW  - Thin films--Surfaces
N1  - Include Index
ER  -