00659 a2200229 4500 GCWUF 20210119215731.0 210119b xxu||||| |||| 00| 0 eng d 9780471720010 MAIN 530.44 LIE Lieberman, Michael A. 4850 PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING / 2ND ED. 2005. Canada: Wiley, 757 p. : ill ; 24 cm. H.B. Include Index Plasma dynamics Plasma chemistry 4851 Thin films--Surfaces 4852 Lichtenberg, Allan J. 4481 ddc BK 11499 11499 0 0 ddc 0 0 NFIC MAIN MAIN SC 2021-01-12 117 25385.52 0 530.44 LIE B0047044 2020-11-03 00:00:00 31731.90 2021-01-12 BK