TY  - GEN
AU  -  Lieberman, M. A. 
AU  - Lichtenberg, Allan J.
TI  - Principles of Plasma Discharges and Material Processing
SN  - 9780471720010
U1  - 530.44 
PY  - 2005///
CY  - Canada
PB  - Wiley-interscience
KW  - Plasma dynamics
KW  - Plasma etching
N1  - Include Index
ER  -