00653 a2200229 4500 GCWUF 20200929032902.0 200929b xxu||||| |||| 00| 0 eng d 9780471720010 ENG MAIN 530.44 LIE Lieberman, M. A. 4478 Principles of Plasma Discharges and Material Processing / 2nd ed. Canada: Wiley-interscience, 2005. xxxv, 757p. : ill; 25 cm. H.B. Include Index Plasma dynamics 4479 Plasma etching 4480 Lichtenberg, Allan J. 4481 ddc BK 11154 11154 0 0 ddc 0 0 NFIC MAIN MAIN GEN 2020-09-18 30 29432.48 0 530.44 LIE B0046453 2020-09-17 00:00:00 36790.61 2020-09-18 BK