@book{11154,
	author = { Lieberman, M. A.  and Lichtenberg, Allan J.},
	title = {Principles of Plasma Discharges and Material Processing /},
	publisher = {Wiley-interscience,},
	year = {2005.},
	address = {Canada:},
	edition = {2nd ed.},
	note = {Include Index}
}